CheckMate Analytical Probe Stations
High-precision manual and semi-automatic probe stations, 150 mm to 300 mm.
Overview
CheckMate is Signatone's analytical probe station line — precision manual, motorized, and semi-automatic systems for DC, CV/IV, high-power, and RF on-wafer test. Every CheckMate shares the same ultra-stable platform architecture: three-point chuck planarization, micrometer-driven theta rotation, selectable pin-hole vacuum zones, and a continuous platen lift for fast probe and DUT exchange.
Specifications
| Parameter | Value |
|---|---|
| Chuck XY travel (CM-210) | 205 mm × 205 mm |
| Travel resolution (fine) | 1.5 µm per degree of knob rotation |
| Chuck Z stage (pneumatic) | 2.5 mm travel · ±1.0 µm repeatability |
| Theta stage | ±11° · < 1.5 µm repeatability |
| High power | up to 12 kV / 600 A |
| RF | up to 110 GHz, 2 & 4 port |
| Hot chuck (optional) | ambient → +300 °C |
Specs from the CheckMate 210 data sheet v1.2 (08-2020). Per-model values vary — see each model's datasheet.
Models & datasheets
Current-revision datasheets, straight from Signatone. No login.
| Model | Description | Datasheet | Quote |
|---|---|---|---|
| CM-170 | 200 mm precision manual probe station for DC/CV/RF and high-power test. | PDF ↓ | Quote → |
| CM-210 | 200 mm high-precision manual probe station for DC, CV/IV, high-power and RF test. | PDF ↓ | Quote → |
| CM-220 | 200 mm precision manual / motorized probe station with joystick. | PDF ↓ | Quote → |
| CM-250 | 200 mm semi-automatic probe station for DC/CV-IV, high-power and RF test. | PDF ↓ | Quote → |
| CM-310 | 300 mm high-precision manual probe station for DC, CV/IV, high-power and RF test. | PDF ↓ | Quote → |
| CM-350 | 300 mm semi-automatic probe station for DC/CV, high-power and RF test. | PDF ↓ | Quote → |
| CM-460 | 150 mm semi-automatic probe station for DC/CV-IV, high-power and RF test. | PDF ↓ | Quote → |
Gallery
Configurations and detail shots from current production. Click any photo to enlarge.
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Spec your CheckMate Analytical Probe Stations
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