MULTI-PURPOSE MANUAL PROBE STATION

Part Number

S-1160

Title

MULTI-PURPOSE MANUAL PROBE STATION

Applications

CV/IV Measurements & Failure Analysis
Manual Analytical Probing
Probe Stations
MEMS Probing

Description

Documents

Technical Specifications

WAFER SAMPLE SIZE

25MM 75MM 100MM 150MM 200MM

SAMPLE HOLD DOWN

INDEPENDENT CONTROLLED VACUUM-ZONES

CHUCK-STAGE MOVEMENT

MANUAL GEAR-DRIVE STAGE

XY TRAVEL OF THE CHUCK

203MM X 203MM 8\” X 8\”

CHUCK MATERIAL

NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)

RESOLUTION STANDARD

75-MICRON PER DEGREE OF KNOB REVOLUTION

RESOLUTION FINE

1-MICRON AT 250-MICRONS OF KNOB REVOLUTION

CHUCK PLANARITY

LESS-THAN 10 MICRONS

CHUCK PLANARITY ADJUSTMENT

YES

THETA SETTING RANGE

360 DEGREES

THETA ROTATION LOCK

OPTIONAL

PLATEN MATERIAL

STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER

PLATEN Z ADJUSTMENT

38MM

CONTACT NON CONTACT HANDLE OF THE PLATEN

10MM

PLATEN CONTACT REPEATABILITY

+-1 MICRON”

OPTICAL STAGE DRIVE

MANUAL- PRECISION LEAD SCREW

OPTICAL BRIDGE XY TRAVEL

50MM X 50MM

OPTICAL BRIDGE Z ADJUST

100 MM MANUAL SET-UP

CHUCK ROLL OUT STAGE FOR EASY LOADING

LOCAL ENCLOSURE

OPTION

PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA

Accessories For Test Stations

Resistivity Test Systems

Probe Stations

Probe Tips & Holders

Micropositioners

Resistivity Testing

RF - Microwave Test Solutions

DC- CV/IV Analytical Probing

High Power Characterization