Signatone · Probe Stations

Signatone Probe Stations and Accessories

Signatone has manufactured analytical probe stations in the USA since 1968. Configure a manual, semi-automatic, RF / mm-wave, four-point resistivity, high-power, or thermal probe station for on-wafer device characterization from DC to 1.1 THz, on wafers from 5 mm to 300 mm. Every system is factory-direct, built to order, and backed by the engineers who designed it — with the datasheet on every card below.

Signatone WL-250 probe station

Manual & Analytical Probe Stations

Signatone's CheckMate and S-1160 probe stations handle DC parametric, CV/IV, high-power, and RF on-wafer test on 150 mm to 300 mm wafers. Choose a precision manual bench or step up to motorized and semi-automatic control, with three-point chuck planarization, micrometer theta rotation, and up to ten micropositioners on the platen.

S-1160 Manual Probe Station
Manual

S-1160 Manual Probe Station

203 × 203 mm · < 1 µm fine travel
CheckMate Probe Stations
Analytical · CM series

CheckMate Probe Stations

7 models · 150 → 300 mm

RF · mm-Wave · THz Probe Stations

WaveLink probe stations are purpose-built for on-wafer RF, mm-wave, and THz measurement — RF to 110 GHz with 2- and 4-port setups, and extender-based configurations from 110 GHz to 1.5 THz. Platens carry multiple RF and DC positioners at once, with local-enclosure variants for shielded, light-tight measurement.

WL-250 RF & mm-Wave
Semi-automatic

WL-250 RF & mm-Wave

200 mm · RF → THz · 2 & 4 port
WL-170-THZ
mmW · THz

WL-170-THZ

200 mm · 110 GHz – 1.5 THz · 2-port

Resistivity Systems

Signatone has built four-point probing solutions since 1968. The Pro4 covers manual sheet and bulk resistivity from 10 µΩ to 100 MΩ per square; the QuadPro2 automates it with full-wafer 2D / 3D contour mapping, up to 14,000 test points, and dual-configuration testing per ASTM F84-99 with NIST-traceable calibration.

QuadPro2
Automated resistivity

QuadPro2

10 – 300 mm · up to 14,000 test points
Pro4 Resistivity
Inline four-point

Pro4 Resistivity

10 µΩ – 100 MΩ/sq · Keithley 2450 / 2600

Compact & Shielded Systems

The H-150 is an economical bench-top probe station for DC and CV/IV testing on 5 mm to 100 mm samples. Pair any station with the PSDB dark box for light-sensitive, high-power, and high-temperature work, plus multipurpose probe-card adapters and specialty chucks.

H-150 Probe Station
Compact · bench-top

H-150 Probe Station

5 → 100 mm · < 10 µm planarity
PSDB & Accessories
Shielded · adapters

PSDB & Accessories

Dark box · probe-card adapters · chucks

Positioners, Probes & Optics

The contact hardware behind every probe station — micropositioners from general-purpose 3-axis to large-area RF / mmW extender mounts, the SP-BT microwave probe series, high-voltage and low-noise probe holders, probing-grade microscopes, and in-house thermal chucks with 0.1 °C control.

Micropositioners
Positioners

Micropositioners

9 models · DC → mmW
RF Probes
Microwave

RF Probes

SP-50BT → SP-1100BT
Microscopes
Optics

Microscopes

4 systems
Thermal Chucks
Thermal

Thermal Chucks

−60 → +300 °C · 0.1 °C
Probe Tips & Holders
Probes

Probe Tips & Holders

SE · HVP · SCA · TRX

Every datasheet, one place.

Current-revision datasheets for every model — no login wall.

Open the technical library →

Common questions about Signatone probe stations

Wafer sizes, applications, lead times, and instrument compatibility — what engineers ask before they spec a station.

From 5 mm samples on the H-150 bench-top probe station through 300 mm wafers on the CheckMate CM-310 / CM-350 and WaveLink WL-310-LE / WL-350-LE. The S-1160 covers 150–200 mm; most CheckMate and WaveLink models are 200 mm-class. Partial wafers, single ICs, and packaged devices are supported across the line.
CheckMate is the analytical probe station line — DC, CV/IV, high-power, and RF to 110 GHz, in manual, motorized, and semi-automatic versions. WaveLink is purpose-built for RF and mm-wave work: the platens carry multiple RF positioners and frequency extenders, with mmW configurations from 110 GHz to 1.5 THz and local-enclosure variants for shielded measurement.
Yes — Signatone has built thermal chuck systems in-house for more than 50 years. The S-1080 controller drives 100 mm to 300 mm chucks with 0.1 °C resolution, covering −60 °C to +300 °C depending on chuck selection.
Yes. CheckMate and WaveLink stations support high-power applications up to 12 kV / 600 A. Pair with HVP-CX-10 (10 kV coax) or HVP-CX-3 / HVP-TX-3 (3 kV) probe holders and the PSDB dark box for safe high-power, high-temperature operation.
Standard configurations typically ship in 4–8 weeks. Custom configurations may take longer depending on complexity and chuck / enclosure availability. We give an exact timeline with every quote.
Yes — we have sales representatives worldwide and have shipped to research labs, fabs, and universities in over 40 countries. International packaging, freight, and export documentation are handled by our shipping team at Signatone.
Yes — that's the point of the modular design. Add a thermal chuck, swap positioners, add a dark box or probe card adapter, or move up to a motorized stage. Send us your model number and we'll spec the upgrade path.
Almost certainly. Signatone stations are used with Keysight, Anritsu, Rohde & Schwarz, and Copper Mountain VNAs; Keysight B1500 / B1505 parameter analyzers; and Keithley SMUs. The Pro4 resistivity system runs under Keithley 2450 / 2600 control.

Let's spec your station.

Tell us your wafer size, test type, temperature range, and frequency requirements. We'll recommend the right platform and configuration. No call center, no ticket queue — engineer to engineer.