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200MM SEMI-AUTOMATIC RF-DC PROBE SYSTEM WITH LOCAL ENCLOSURE

Part Number

WL-250-LE

Title

200MM SEMI-AUTOMATIC RF-DC PROBE SYSTEM WITH LOCAL ENCLOSURE

Applications

Automated Probing
HF & RF Microwave Probing
Low Current Analysis
Millimeter Wave Probing
MEMS Probing
Probe Stations
Thermal Characterization

Description

THE WAVELINK 250-LE (WL-250-LE) 200MM SEMI-AUTOMATIC PROBE STATION SERIES IS PRIMARILY USED FOR DC, CV, HIGH POWER, RF, HF, LOW CURRENT AND/OR APPLICTIONS THAT REQUIRE A LOCAL ENCLOSURE. THE LOCAL ENCLOSURE IS KEY FOR EMI AND/OR SUB-DEW TEMPURATURE PROBING WITH A MOISTURE CONTROLLED ENVIRONMENT. SIGNATONE OFFERS FLUID COOLED CHUCKS WITH TEMPERATURES RANGING FROM -60°C TO +300°C. THE WL-250-LE HEAVYDUTY MICROSCOPE STATGE ALLOWS INTEGRATION OF VARIOUS MICROSCOPES, LASERS, OUR DUAL BRIDGE FOR 2-IN1 MICROSCOPE MOUNTING, CAMERA’S, PHOTONIC DEVICES, INTEGRATING SPHERES AND MORE. THE X-Y-Z MOTION CONTROL IS DRIVEN BY LEADSCREWS INTEGRATED WITH 0.1 MICRON LINEAR SCALES AND CLOSED-LOOP SERVO TECHNOLOGY.  SIGNATONE’S PROBMASTER SOFTWARE GIVES THE USER COMMAND OF ALL MOTION CONTROL, STEP-AND-REPEAT PROGRAMMING, WAFER MAPPING AND MORE. ADD OUR PRECISION WL-JOYSTICK WITH SMOOTH THUMB-WHEEL X-Y-Z CONTROL OF THE WAFER STAGE, MICROSCOPE STAGE AND OPTIONAL COMPUTER AIDED PROBES (see CAP-946 micropositioners).

Documents
Technical Specifications
WAFER SAMPLE SIZE
25MM 75MM 100MM 150MM 200MM
SAMPLE HOLD DOWN
INDEPENDENT CONTROLLED VACUUM-ZONES
CHUCK-STAGE MOVEMENT
CLOSED-LOOP HIGH PRECISION SERVO MOTOR PID CONTROL
XY TRAVEL OF THE CHUCK
205MM X 205MM 8″ X 8″
CHUCK MATERIAL
NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)
RESOLUTION STANDARD
0.5 μm
ACCURACY
±2.0 μm
CHUCK PLANARITY
LESS-THAN 10 MICRONS
CHUCK PLANARITY ADJUSTMENT
YES
CHUCK Z MOTION
PROGRAMABLE
CHUCK Z TRAVEL
12.5MM (0.5 in)
CHUCK Z RESOLUTION
0.25 μm
CHUCK Z ACCURACY
±2.0 μm
CHUCK Z REPEATABILITY
±1.0 μm
CHUCK Z STAGE DRIVE
CLOSED-LOOP MICRO STEPPER MOTOR
CHUCK THETA MOTION
PROGRAMABLE
THETA SETTING RANGE
±7.5° (15°)
THETA RESOLUTION
0.000035°
THETA ACCURACY
<1.0ΜM (MEASURED AT THE EDGE OF THE 200MM CHUCK)
THETA REPEATABILITY
<1.5 μm
THETA STAGE DRIVE
HIGH RESOLUTION MICROMETER
CHUCK ROLL OUT STAGE:
YES PRESENTATION 190MM
PLATEN MATERIAL
STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER
PLATEN Z ADJUSTMENT
38MM WITH LOCK
PLATEN CONTACT SEPERATE
10MM
PLATEN CONTACT REPEATABILITY
±1 MICRON
OPTICAL STAGE DRIVE
MANUAL-COARSE-FINE KNOB
OPTICAL BRIDGE XY TRAVEL
50MM X 50MM
OPTICAL BRIDGE Z TRAVEL
101MM PNEUMATIC LIFT
CALIBRATION CHUCK
YES, WITH OPTIONAL 2ND CAL CHUCK
LOCAL ENCLOSURE
YES (-65°C to +300°C)
OPTION
PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA

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