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WL-170-THZ STABLE MANUAL RF-mmW PROBE STATION

Part Number

WL-170-THZ

Title

WL-170-THZ STABLE MANUAL RF-mmW PROBE STATION

Applications

HF & RF Microwave Probing
CV/IV Measurements & Failure Analysis
DC To THz Probe Head Selection
Frequency Extenders and Tuners
Millimeter Wave Probing

Description

WL-170-THZ PROBE STATIONS DESIGNED FOR RELIABLE AND ACCURATE TEST OF mmW, THz, AND INPEDANCE TUNER APPLICATIONS

Documents
Technical Specifications
WAFER SAMPLE SIZE
25MM 75MM 100MM 150MM 200MM
SAMPLE HOLD DOWN
INDEPENDENT CONTROLLED VACUUM-ZONES
CHUCK-STAGE MOVEMENT
MANUAL GEAR-DRIVE STAGE
XY TRAVEL OF THE CHUCK
203MM X 203MM 8″ X 8″
CHUCK MATERIAL
NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)
RESOLUTION STANDARD
75-MICRON PER DEGREE OF KNOB REVOLUTION
RESOLUTION FINE
1-MICRON AT 250-MICRONS OF KNOB REVOLUTION
CHUCK POSITION
CHUCK ABOVE THE PLATEN
CHUCK PLANARITY
LESS-THAN 10 MICRONS
CHUCK PLANARITY ADJUSTMENT
YES
CHUCK Z TRAVEL
2.5MM PRECISION PNEUMATIC LIFT
THETA SETTING RANGE
± 11° (22°)
THETA RESOLUTION
0.01MM PER DEGREE OF KNOB ROTATION
THETA STAGE DRIVE
HIGH RESOLUTION MICROMETER
CHUCK ROLL OUT STAGE
YES PRESENTATION 190MM
PLATEN MATERIAL
STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER
PLATEN Z ADJUSTMENT
38MM WITH LOCK
PLATEN CONTACT SEPERATE
10MM
PLATEN CONTACT REPEATABILITY
+-1 MICRON
OPTICAL STAGE DRIVE
MANUAL-COARSE-FINE KNOB
OPTICAL BRIDGE XY TRAVEL
50MM X 50MM
OPTICAL BRIDGE Z TRAVEL
101 MM PNEUMATIC LIFT
CALIBRATION CHUCK
YES OPTIONAL 2ND CHUCK
LOCAL ENCLOSURE
NOT STANDARD – AVAILABLE ON UPGRADED SYSTEM
OPTION
PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA

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