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CHECKMATE 200MM SEMI-AUTOMATIC PROBE STATION

Part Number

CM-250

Title

CHECKMATE 200MM SEMI-AUTOMATIC PROBE STATION

Applications

CV/IV Measurements & Failure Analysis
Automated Probing
HF & RF Microwave Probing
Probe Stations

Description

THE CHECKMATE 250 SEMI-AUTOMATIC PROBE STATION SERIES IS WELL KNOWN IN THE INDUSTRY AS A PROBE STATION WORK HORSE. ITS HEAVYDUTY MICROSCOPE STAGE ALLOWS INTEGRATION OF VARIOUS MICROSCOPES, LASERS, OUR DUAL BRIDGE FOR 2-IN-1 USE OF MICROSCOPES, LIGHT EMMITERS, CAMERA’S, PHOTONIC DEVICES, INTEGRATING SPHERES…YOU NAME IT. THE X-Y-Z MOTION CONTROL IS DRIVEN BY LEADSCREWS INTEGRATED WITH 0.1 MICRON LINEAR SCALES AND CLOSED-LOOP SERVO TECHNOLOGY. SIGNATONE’S PROBEMASTER SOFTWARE GIVES THE USER COMMAND OF ALL MOTION CONTROL, STEP-AND-REPEAT PROGRAMMING, WAFER MAPPING AND MORE. ADD OUR PRECISION CM-JOYSTICK WITH SMOOTH THUMB-WHEEL X-Y-Z CONTROL OF THE WAFER STAGE AND MICROSCOPE STAGE.

Documents
Technical Specifications
WAFER SAMPLE SIZE
25MM 75MM 100MM 150MM 200MM
SAMPLE HOLD DOWN
INDEPENDENT CONTROLED VACUUM-ZONES
CHUCK-STAGE MOVEMENT
CLOSED-LOOP HIGH PRECISION SERVO MOTOR PID CONTROL
XY TRAVEL OF THE CHUCK
205MM X 205MM 8″ X 8″
CHUCK MATERIAL
NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)
RESOLUTION STANDARD
0.5 μm
ACCURACY
±2.0 μm
CHUCK PLANARITY
<10 MICRONS
CHUCK PLANARITY ADJUSTMENT
YES
CHUCK Z MOTION
PROGRAMABLE
CHUCK Z TRAVEL
12.5MM (0.5 in)
CHUCK Z RESOLUTION
0.25 μm
CHUCK Z ACCURACY
±2.0 μm
CHUCK Z REPEATABILITY
±1.0 μm
CHUCK Z STAGE DRIVE
CLOSED-LOOP MICRO STEPPER MOTOR
CHUCK THETA MOTION
PROGRAMABLE
THETA SETTING RANGE
±7.5° (15°)
THETA RESOLUTION
0.000035°
THETA ACCURACY
<1.0ΜM (MEASURED AT THE EDGE OF THE 200MM CHUCK)
THETA REPEATABILITY
<1.5 μm
THETA STAGE DRIVE
HIGH RESOLUTION STEPPER MOTOR, ROTARY ENCODER FEEDBACK SYSTEM
CHUCK ROLL OUT STAGE
YES PRESENTATION 195MM-190MM PRESENTATION
PLATEN MATERIAL
STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER
PLATEN Z ADJUSTMENT
38MM WITH LOCK
CONTACT NON CONTACT HANDLE OF THE PLATEN
10MM
PLATEN CONTACT REPEATABILITY
±1 MICRON
OPTICAL STAGE DRIVE
MANUAL-COARSE-FINE KNOB
OPTICAL BRIDGE XY TRAVEL
50MM X 50MM
OPTICAL BRIDGE Z TRAVEL
101 MM PNEUMATIC LIFT
CALIBRATION CHUCK
NO (OPTIONAL)
LOCAL ENCLOSURE
NO (AMBIENT to +300°C)
OPTION
PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA AND MORE

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