CAT - Process Chamber Assurance Tool

Dedicated to improving Process Performance.

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Designed to test pressure sensors, mass flow controllers, pump performance, and chamber integrity.

CAT is used primarily for:

Key Features:

User Friendly Features

Windows Software Interface

The control software operates under Windows 95 (or Windows98). Cue cards and help screens navigate operators through the test procedures making testing a simple operation. A great deal of flexibility allows engineers to design the full array of test or focus on one area of concern.

Security

The CAT software features four levels of security. Operators may run all of the configured test. Service security level users may run tests and view configurations to assure the CAT is working properly. Engineer level users may define the test specifications for each process tool and components. Finally, the owner has full access to all controls including defining the security levels of the other users.

System Status

The status view displays the active system with the components presently under test. Graphic representations of gas flows and valves opening provide a birds eye view of the overall configuration. Setting up configurations for multiple process chambers is made simple by the pre-loaded defaults and copy configuration features. Each CAT system comes pre-loaded with factory specifications for most MFCs and manometer types. Selecting the model number automatically loads the default settings. Also, once a process system's configuration is completed, copying the configuration for like process systems is just a couple of mouse clicks away.

Mechanical Features

The CAT has four swivel wheels t assure easy movement into corners and narrow race ways. The small foot print of 20" by 24" adds to maneuverability. A utility drawer provides a great place for storing cables, adapters and spare components. A retractable power cord and flexcoil reference connections prevent unwanted cables dragging behind when moving from process. Stainless steel skins ensure class 1 clean room compliance.

Performance Specifications:

Pressure Sensor (specified for 10 Torr Reference)

  1. Pressure Sensor Zero Offset to within 1 mTorr
  2. Pressure Sensor Slope Errors to within +0.5%
  3. Pressure Sensor Linearity Deviation to within 2 mTorr

Chamber Leak Rate

  1. Actual Rate of Rise to better than 1 mTorr/minute

Pumping Performance

  1. Measurement of pumping speed over a user defined range
  2. Defined pump-down to target within 1 second
  3. Base pressure to within 1 mTorr

Mass Flow Controller

  1. Average Flow rate to within +0.5% FSR
  2. Time to come into controlled flow to within 1 second
  3. RMS deviation from average flow rate
  4. Graphical display of real time flow information & analysis
  5. Zero offset to <+0.5% FSR
  6. Gain to <0.5% FSR
  7. Linearity to <0.5% FSR

General

  1. Repeatability is better than 1% (typically 0.1%). Test results are correctly compensated for system temperature and leak rate where applicable
  2. Depending on the configuration, the CAT will characterize equipment from 1x10-4 Torr to 100 Torr
  3. Dimensions: which 29.25",depth 26", height 52"
LucasSignatone Corporation, Manufacturers & Producers, Gilroy, CA