CheckMate Probe Stations
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CM250 CheckMate Probe Station
CheckMate Probe Station CM250
The CheckMate Series Probe Stations are available with Signatone's local enclosure option. This option provides a local environmental chamber around the wafer stage to provide:
- Elimination of moisture or frost build-up when using a cold chuck (-65°C to +200°C)
- A dark environment for making light sensitive measurements
- EMI Protection, i.e., shielding from electromagnetic and electrostatic interference, allowing low current measurements using Signatone's Triaxial technology. Our Triaxial package provides measurement capability down to the noise floor capability of instruments such as the HP4156A parametric analyzer ( 1 fA).