The Signatone QuadPro Process Development Resistivity System is available in both manual and automatic 8" and 12" systems. The manual system includes a ball bearing stage and can be upgraded at a later time to add auto-stepping capability. The automatic systems are motorized and can automatically step through 9, 25, 49, or 121 test points on wafers of size 100 mm, 125 mm, 150 mm, 200 mm, or 300mm.
The systems use Four-Point Probes with a state of the art current source and electronic DVM combined with a dual configuration test procedure and test integration to obtain an accuracy of better than 1% over the resistivity range from 1 milli-ohm to 2 Meg-ohms per square. The accuracy and calibration are NIST traceable. The automatic system is fully integrated and operates under Windows 95/98 with a Pentium based controller.
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