MEMS Testing

Signatone offers micro probing equipment for MEMS applications and provides support for a wide range of the associated instrumentation such as laser vibrometers and interferometers. This often requires an extremely stable optical platform and involves custom optics packages with extended bandwidth and special light handling requirements.

SP170X / MICROTOOL

Nickel MicroTools (0 – 1000 µm)
Sub Micron Tip Control

0 to 1000 µm tip-to-tip opening Ultra high-resolution tip control Strong, robust metal microtips Precise tip alignment MEMS and biological applications

 Description

The Signatone SP170X features a suite of exceptionally strong, high-resolution microtools. The actuating mechanism consists of a proprietary micro cam-drive1 that moves axially across the nickel microtool to rigidly and precisely position the tool tips. 

This elegant and simple actuation precludes the need for electrostatic or electrothermal forces to provide the gripping strength. The SP-170X series is ideally suited for applications that require long-lasting tips and high-resolution control for grasping, manipulating, and excising microscale objects.

Features

Tip Styles

Fig.	Microtool Name	Part No.
A	Outsloped-forceps	TM7001
B	Scoop Tip	TM7002
C	Multi-prong Tip	TM7003
D	Circle Notch Tip	TM7004
E	Square Notch Tip	TM7005
F	Piercing Tip	TM7006
G	Micro-forceps	TM7007
H	Serrated Tip	TM7008
I	Square Tip	TM7009

TM70## [Max Tip Width]-[Beam Cross Section]; Max Tip Width = 80, 320, 1000 µm. Beam Cross Section = 40 x 20 µm.

SP170X System

The SP170X system couples the precise control of Signatone’s SP-100 in-line Micropositioner with Teneo’s high-resolution microtool actuation assembly. The (3) axis knobs control the x, y, and z location of the tweezer.  A (4th) actuation knob regulates the opening and closing of the tip. Additionally, a (5th) rotation knob enables 360 º of continuous rotation. (includes tip # TM7001)

 Applications

Sample Applications

Positioning MEMS stator	Manipulation of crystals	Micro-dissection of Aplysia Ganglia

Click the above images for a large view.

Using Electroded Microtools for Cellular Stimulation and Sensing

Methodology: Individual cells were mechanically damaged through controlled positioning and movement of tool tip in the presence of a permeable dye. Simultaneously the dye uptake was electrically monitored and recorded and correlated to the electrophysiological response from injury to quantify cellular damage. This study provided a multi-faceted approach to explain the role of neuronal plasma membrane disruptions and its functional consequences.

Result: Simple, low-cost, repeatable execution of a potentially complicated and involved experiment.

Actuation, measurements, and calibration of MEMS/NEMS sensors & actuators

The Signatone probe station is used regularly for MEMS/NEMS post-fabrication testing, which is essential for the verification of functionality and physical properties of designs.

The probe station with an integrated high-power optical microscope and micromanipulators enables us to conduct mechanical testing of microstructures with feature sizes at the micrometer scale and establish electrical connections with micrometer scaled electrodes for actuation, measurements, and calibration of MEMS/NEMS sensors and actuators. The following SEM picture shows a MEMS cellular force sensor that was tested using the Signatone probe station.

Click here to download the SP170X / MicroTool Brochure.